Molecular formula: | C12H32N4Zr |
Average mass: | 323.640 |
Monoisotopic mass: | 322.167401 |
ChemSpider ID: | 21170079 |
175923-04-3
[RN]Ethanamine, N-methyl-, zirconium(4+) salt (4:1)
[ACD/Index Name]MFCD03427131
[MDL number]Temaz
[Trade name]Tetrakis(ethylmethylamido)zirconium(IV)
Tetrakis(ethylmethylamino)zirconium(IV)
Tétrakis[éthyl(méthyl)azanide] de zirconium(4+)
[French]
[ACD/IUPAC Name]Zirconium(4+) tetrakis[ethyl(methyl)azanide]
[ACD/IUPAC Name]Zirconium(4+)tetrakis[ethyl(methyl)azanid]
[German]
[ACD/IUPAC Name]99%
99% TEMAZ, contained in 50 ml Swagelok cylinder for CVD/ALD
ETHYL(METHYL){TRIS[ETHYL(METHYL)AMINO]ZIRCONIO}AMINE
temaz: zr[n(ch3)(ch2ch3)]4
TETRAKIS ZIRCONIUM
Tetrakis(ethylmethylamino)zirconium
ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE)
zirconium(4+) tetrakis(ethyl(methyl)azanide)
Zirconium(4+)tetrakis[ethyl(methyl)azanid]