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- Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties. Ke Xu, Ayan Roy Chaudhuri, Harish Parala, Dominik Schwendt, Teresa de los Arcos, H. Jörg Osten, Anjana Devi
, J. Mater. Chem. C
, 2013
, 1
, 3939